Our plants combine industry leading energy efficiency and purity levels with compact modular designs, meeting both the SIA technology roadmap and economic drivers.
With a state of the art network of clean room cylinder filling and corrosive gases purification plants, Linde offers an unrivalled infrastructure of stocking and logistics capabilities.
For chamber cleaning applications, the Linde Generation-F series of on site fluorine generators are specifically designed to meet the exacting requirements of the electronics industry. Linde has been supplying low pressure, high purity fluorine gas safely and reliably to CVD tools for more than a decade.
Our extensive process knowledge and leading edge R&D programs ensure our electronic gases and chemicals exceed the stringent purity and supply consistency demands of our customers.